Instruments & Services

NCF Instruments

Descriptions of these instruments, the pricing for assisted/unassisted use of these instruments as well as the training fees can be found in the instrument descriptions and on the UICore website. For any additional information please contact the NCF staff.

Please note, Investigators from the Northwestern University and the University of Chicago are provided internal rates as all UIC users. All other users can access services but, at either external academic or external non-academic rate.

Instrument Name

Manufacturer

Model

Blue M Programmable Oven

Blue M

IGF-668OE-MP

Bruce Oxidation Furnace

Bruce

Bruker-Nano Atomic Force Microscope

Bruker-Nano

Bruker-Nano Contour GT-K Optical Profilometer

Bruker-Nano

Contour GT-K

Bruker-Nano Discover 8 X-Ray Diffraction System

Bruker-Nano

Discover 8

Disco Automatic Dicing Saw

Disco

DAD 321

Tousimis Critical Point Dryer

Tousimis

CVC SC-4000 Deposition System

CVC

SC-4000

Gaertner Ellipsometer

Gaertner

Harrick Barrel Plasma Etcher

Harrick

Karl Suss MA6 Mask Aligner

Karl Suss

MA6

Karl Suss MJB3 Mask Aligner

Karl Suss

MJB3

KLA-Tencor P7 Stylus Contact Profilometer

KLA-Tencor

P7

KOH Variable Temperature Bath

Haake

W26

Lindberg Tube Oven

Lindberg

Malvern Dynamic Laser Scattering System

Malvern

Zetasizer Nano

Microautomation Model 1006 Dicing Saw

Microautomation

TV1006

Nanoscribe 3D Lithography System

Nanoscribe

Oxford Deep Reactive Ion Etch (DRIE) System

Oxford

Plasmalab System 100

Parylene C Deposition System

Specialty Coating Systems

PDS 2010

Parylene N Deposition System

Specialty Coating Systems

PDS 2010

PTL LPCVD System

PTL

Raith Electron Beam Lithography

Raith

eLine

Rapid Thermal Processor

Photonami

Sonoscan Gen-6 C-mode Scanning Acoustic Microscope

Sonoscan

Gen-6

STS 340 RIE / 310 PECVD System

Surface Technology Systems

340/310

TA Instruments DSC System

TA Instruments

Q2000

TA Instruments TGA System

TA Instruments

Q5000

Technics SEM Sputter Coater

Technics

Hummer V

Tencor P1 Stylus Contact Profilometer

Tencor

P1

Thermionics VE-100 Vacuum Evaporator

Thermionics

VE-100

Torrey Pines Scientific Programmable Ramping Hot Plate

Torrey Pines Scientific

TYKMA Electrox Laser Marking System

TYKMA Electrox

EMS 300

Varian Electron Beam Evaporator

Varian

Veeco-Wyko Optical Profilometer

Veeco-Wyko

NT3300

Westbond Wedge-Wedge Gold Wire Bonder (New wire bonder)

Westbond

7476E

Westbond Ultrasonic Ball and Wedge Bonder (Old wire bonder)

Westbond

7700A

Electrical Measurement Instruments

Manufacturer

Model

Instrument Name

Hewlett Packard

4284A

HP Precision LCR Meter

Hewlett Packard

4140B

HP pA Meter/DC Voltage Source

Keithley

2450

Keithley Source Meter

MMR Technologies

K-20

Programmable Temperature Controller

MMR Technologies

H-50

Hall. Van Der Paw Controller

Stanford Research Systems

SR830

DSP Lock-in Amplifier

Veeco

FPP-100

Four Point Probe